Advanced high-speed low-temperature sputtering technology, greatly expanded the scope of application of Chi-CCZK-SF magnetic devices that can not heat or heat of the products provide quality solutions sputtering using Chi-innovation process, excellence, The EU adopted a comprehensive CE and ISO international quality management system certification;
CCZK-SF magnetron sputtering equipment
Cavity structure: vertical front door, the front door horizontal.
Material material: cavity made of SUS304 stainless steel or carbon steel
Vacuum system: diffusion pump (optional molecular pump) + roots pump mechanical pump + maintain pump (otherwise cryogenic pump systems to choose from)
Sputtering targets: central cylindrical target, planar target, target, etc. twin
Magnetron power: it can be equipped with a DC or MF magnetron sputtering power
Rotation system: frequency control, combined rotation and revolution, according to customer requirements for product and design
Film structure: single-layer film, multilayer film
Gas control: Gas flow control device integrated touch operation control
HMI: PLC intelligent control + full-color touch screen HMI
Operating mode: logic of automatic mode, semi-automatic mode, manual mode
Intelligent Control: PLC intelligent control + HMI full-color touch human-machine interface, to achieve automatic control
Alarm and protection: abnormal situation alarm, and implement the appropriate protective measures.
Other technical parameters:
Ultimate vacuum: 5.0 × 10-4Pa
Pumping speed: 5.0 * 10-2≤5min
Hydraulic flow rate ≥0.2Mpa 3m3 / h; temperature ≤25 ℃; Pressure: 0.4-0.8Mpa;
Remarks:
General Specifications:
Φ1000mm * H1200mm, Φ1400mm * H1600mm, Φ1200mm * H1500mm,
Φ1800mm * H2000mm, Φ2000mm * H2200mm
Vacuum chamber size or device configurations according to customer requirements for customized products and special process